Semiconductor solutions

In the semiconductor manufacturing process, wafers are following a trend toward ever thinner thicknesses. Nikon s outstanding proprietary technology makes optimal solutions for these “no-error” market.

 

 

NWL200: Nikon Wafer Loader 200

  • Fully secured wafer loader to our L200N microscopes for full manual or automated inspection.
  • Incl: wafer alignment, cross-slot-detection, mark detection (notch, flat or double flat), cassette programs, sample programs, good/not-good put back, 6 & 8 inch…
  • Option: Macro inspection, Macro image capturing, IR, …

NWL200 + L200N

OST3100: OPTISTATION3100 (1 foup port)

 

OST3200: OPTISTATION3200 (2 foup port)

Engineered to provide cost-effective support for 300mm wafers with a minimal footprint, the Optistation features an advanced micro/macro system in a compact, flexible design. The optical system offers brighter images, and observation techniques can be programmed for each objective magnification and each substrate layer to be inspected.

OST3100

OST3200

L300N