High Speed and High Accuracy
| Type | Meetbereik X Y Z |
| VMZ-H3030 (Ultra High Precision) | 300 x 300 x 150 |
| – EUX, MPE, EUY, MPE: 0.6 + 2L/1000 μm | |
| – EUXY, MPE: 0.9 + 3L/1000 μm | |
| – 5 optical heads (type 1,2,3,4 & TZ) |
Opties: TTL Laser (line scan, area scan and layer thickness)
Meetsoftware:
- AutoMeasure
- NEXIV Profiler
- NEXIV Report
- NEXIV EDF / Stitching Express
