High Speed and High Accuracy

Type Meetbereik X Y Z
VMZ-H3030 (Ultra High Precision) 300 x 300 x 150
  – EUX, MPE, EUY, MPE: 0.6 + 2L/1000 μm
  – EUXY, MPE: 0.9 + 3L/1000 μm
  – 5 optical heads (type 1,2,3,4 & TZ)

 

Opties: TTL Laser (line scan, area scan and layer thickness)

Meetsoftware:

  • AutoMeasure
  • NEXIV Profiler
  • NEXIV Report
  • NEXIV EDF / Stitching Express